發(fā)布時間：2018-06-23 08:31

  本文選題：飛秒激光 + 微加工��； 參考：《浙江大學(xué)》2016年博士論文

【摘要】：光纖傳感系統(tǒng)具有靈敏度高、結(jié)構(gòu)精巧、抗電磁干擾、耐腐蝕并能實現(xiàn)分布式測量等優(yōu)勢,在科研、生產(chǎn)、安全等領(lǐng)域的應(yīng)用日益增加。飛秒激光具有超短的脈沖寬度、超高的峰值功率,從根本上改變了激光加工過程中的光與材料的作用機理,具有精度高、加工材料廣泛及真三維加工等優(yōu)勢,被廣泛應(yīng)用于各種功能器件的加工過程。本論文以飛秒激光加工的光纖微結(jié)構(gòu)傳感器為中心內(nèi)容,從傳感機理、模式分析、數(shù)值仿真、制作工藝及傳感測試等方面展開研究,并對加工光束的優(yōu)化問題進行了探討。論文的主要創(chuàng)新性工作包括以下三個方面：(1)開展了基于微拉錐的光纖內(nèi)微腔傳感技術(shù)研究,獲得了一種多功能、小體積、高強度、低成本的光纖傳感器。理論分析了基于內(nèi)置微腔的干涉型光纖傳感器機理,對雙光束干涉公式解析得到傳感器的溫度、縱向應(yīng)力及外界折射率傳感靈敏度均與模式階數(shù)有關(guān)的結(jié)論;建模并仿真分析了微腔壁中的傳導(dǎo)模式,探討了傳感器在縱向應(yīng)力及折射率傳感時存在紅移或藍移的可能性；實驗研究了光纖內(nèi)置微腔傳感器的制作方法,確定了飛秒激光燒蝕-熔接-微拉錐的三步法制作流程并優(yōu)化了工藝參數(shù);測試了微拉錐內(nèi)微腔干涉儀在溫度、應(yīng)力和折射率方面的傳感性能,實驗獲得了與理論研究一致的結(jié)果;實現(xiàn)了微拉錐內(nèi)微腔干涉儀用于溫度與應(yīng)力同時測量;為增強器件對外部折射率的響應(yīng)進行了微腔壁的減薄處理,實驗獲得該器件在低折射率區(qū)間靈敏度達到4202nm/RIU,較微拉錐微腔傳感器提升約100倍。(2)開展了基于選擇填充光子晶體光纖的傳感技術(shù)研究,獲得了一種設(shè)計靈活、制備可控的彎曲矢量傳感器。理論研究了選擇填充光子晶體光纖耦合器的傳感機理,建模并仿真分析了光子晶體光纖結(jié)構(gòu)參數(shù)及填充材料對耦合器傳感性能的影響;以正交位置填充不同折射率液的方案,設(shè)計了能夠?qū)崿F(xiàn)全空間彎曲矢量測量的傳感器;實驗研究了以飛秒激光為關(guān)鍵加工手段的選擇填充光子晶體光纖耦合器的制備方法;測試了耦合器的彎曲傳感特性,在0-10.7m-1曲率范圍內(nèi)獲得具方向指示的線性響應(yīng),靈敏度達到-1.20nm/m-1,實驗結(jié)果與理論分析高度統(tǒng)一,為特殊功能傳感器的設(shè)計和制備提供了可靠的依據(jù)。(3)開展了飛秒激光加工光束的優(yōu)化技術(shù)研究,設(shè)計了一種能夠減小光斑橫向尺寸并延長焦深的光瞳濾波器。以矢量衍射方法計算了徑向偏振光在聚焦點附近的光強分布;分析了影響光斑尺寸的主要因素并以此為依據(jù)設(shè)計了連續(xù)相位型光瞳濾波器;以橫向超分辨因子為優(yōu)化目標(biāo),施特列爾比為約束條件對濾波函數(shù)進行了優(yōu)化,計算結(jié)果表明在保持較高能量利用率的同時(S=0.5),獲得了更小的聚焦光斑(GT=0.75)。
[Abstract]:The optical fiber sensing system has many advantages such as high sensitivity, fine structure, anti-electromagnetic interference, corrosion resistance and distributed measurement. It is widely used in scientific research, production, safety and other fields. Femtosecond laser has ultrashort pulse width and super-high peak power, which fundamentally changes the action mechanism of light and material during laser processing, and has the advantages of high precision, wide range of machining materials and true three-dimensional machining. It is widely used in the machining process of various functional devices. In this paper, the optical fiber micro-structure sensor fabricated by femtosecond laser is the focus of this paper. The research is carried out from the aspects of sensing mechanism, mode analysis, numerical simulation, fabrication technology and sensing test, and the optimization of the processing beam is discussed. The main innovative work includes the following three aspects: (1) A multi-functional, small volume, high strength and low cost optical fiber sensor is obtained by researching the micro-cavity sensing technology based on micro-tapered fiber. The mechanism of interferometric optical fiber sensor based on built-in microcavity is analyzed theoretically. The conclusion that the temperature, longitudinal stress and sensitivity of external refractive index sensor are related to the order of mode is obtained by analyzing the two-beam interferometric formula. The conduction mode in the microcavity wall is modeled and simulated, and the possibility of redshift or blue shift in the longitudinal stress and refractive index sensor is discussed, and the fabrication method of the fiber optic microcavity sensor is studied experimentally. The three-step fabrication process of femtosecond laser ablation, welding and microtaper was determined, and the process parameters were optimized, and the sensing performance of the micro-cavity interferometer in the micro-pulling cone was tested in terms of temperature, stress and refractive index. The experimental results are in agreement with the theoretical study. The microcavity interferometer is used to measure temperature and stress simultaneously. In order to enhance the response of the device to the external refractive index, the microcavity wall is thinned. Experimental results show that the sensitivity of the device in the low refractive index range is 420nm / r IUs, which is about 100 times higher than that of the micro-cavity sensor. (2) the sensor technology based on optionally filled photonic crystal fiber is studied, and a flexible design is obtained. A controllable bending vector sensor is fabricated. The sensing mechanism of optionally filled photonic crystal fiber coupler is studied theoretically, and the influence of the structure parameters of photonic crystal fiber and the filling material on the sensing performance of the coupler is simulated and analyzed. The sensor which can realize the full space bending vector measurement is designed, the fabrication method of the optionally filled photonic crystal fiber coupler with femtosecond laser as the key processing method is studied experimentally, and the bending sensing characteristics of the coupler are tested. The linear response with direction indication is obtained in the range of 0-10.7m-1 curvature. The sensitivity is -1.20 nm / m ~ (-1). The experimental results are in good agreement with the theoretical analysis. It provides a reliable basis for the design and fabrication of special functional sensors. (3) the optimization technology of femtosecond laser processing beam is studied and a pupil filter is designed which can reduce the transverse size of the spot and prolong the focal depth. The intensity distribution of radial polarized light near the focal point is calculated by using vector diffraction method. The main factors affecting the size of the spot are analyzed and the continuous phase pupil filter is designed based on it. The transverse super resolution factor is used as the optimization target. The filter function is optimized by using Stellsby as a constraint condition. The calculation results show that a smaller focused spot (GTN 0.75) can be obtained while maintaining a higher energy utilization ratio (S0. 5).
【學(xué)位授予單位】：浙江大學(xué)
【學(xué)位級別】：博士
【學(xué)位授予年份】：2016
【分類號】：TP212

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