發(fā)布時(shí)間：2018-07-26 10:44

【摘要】：如何在幾米、幾十米甚至幾公里的距離上實(shí)現(xiàn)快速、高精度的絕對距離測量一直是計(jì)量科學(xué)和工業(yè)生產(chǎn)關(guān)注的熱點(diǎn)課題,尤其在現(xiàn)有基于增量式測量的激光干涉儀已經(jīng)不能滿足科學(xué)研究及裝備制造需求的情況下,研究分辨率優(yōu)于1μm、測量時(shí)間小于1 s的大尺寸絕對距離測量方法及裝置對我國基礎(chǔ)科學(xué)研究和高端裝備制造都具有重要意義。傳統(tǒng)絕對距離測量方法可分為合成波長法和時(shí)間飛行法。其中合成波長法由于需要待測距離初值和多個(gè)波長來建立合成波長鏈,因此不適用于目標(biāo)位置未知的大距離快速測量。時(shí)間飛行法雖然適用于大尺寸測量,但是受電子探測器皮秒分辨率限制,距離分辨率只能達(dá)到毫米,不能滿足微米量級的測量要求。因此,本論文研究了基于異步光學(xué)采樣和非線性倍頻效應(yīng)的脈沖時(shí)域分辨方法,將時(shí)間飛行法的時(shí)域分辨率提升至優(yōu)于1 fs,對應(yīng)距離分辨優(yōu)于300 nm,從而滿足大尺寸絕對距離測量的需求。建立了以光學(xué)頻率梳作為光源的絕對距離測量系統(tǒng)。利用頻率梳重復(fù)頻率的差異進(jìn)行異步光學(xué)采樣,實(shí)現(xiàn)對脈沖的時(shí)域光學(xué)掃描,同時(shí)利用第二類相位匹配強(qiáng)度互相關(guān)量化脈沖重疊程度,通過倍頻信號(hào)的強(qiáng)度反演被測脈沖的時(shí)域位置,由此實(shí)現(xiàn)優(yōu)于1 fs的脈沖時(shí)域分辨。此外,為了克服頻率梳周期脈沖特性對量程的限制,提出并行雙重頻測量,避免重頻調(diào)節(jié)過程中待測目標(biāo)位置變化引起的整周期判讀錯(cuò)誤,實(shí)現(xiàn)量程的可靠拓展。考慮使用的非線性效應(yīng)對脈沖功率的需求,提出利用電參考代替光學(xué)參考,避免了參考臂光能量損耗,提高有效測量范圍。針對大氣中長距離測量折射率問題,利用基頻脈沖倍頻效應(yīng),對目標(biāo)進(jìn)行雙波長并行測量,進(jìn)行干燥條件近似下的空氣折射率測量。使用倍頻互相關(guān)探測基頻脈沖時(shí)域位置,使用和頻互相關(guān)探測倍頻脈沖時(shí)域位置,在12.3 m距離上實(shí)現(xiàn)折射率10-6的修正。針對空間應(yīng)用超遠(yuǎn)距離測量,提出以頻率梳為光源的主動(dòng)激光測距實(shí)驗(yàn)方法,利用設(shè)置在兩站的頻率梳交互測量,實(shí)現(xiàn)兩站之間絕對距離的測量。同時(shí),考慮兩站使用不同時(shí)間基準(zhǔn)對時(shí)間飛行測量的影響,在距離測量的同時(shí),通過測量倍頻脈沖時(shí)間間隔,實(shí)現(xiàn)兩地之間的頻率基準(zhǔn)傳遞。在兩站距離23 m時(shí),距離測量殘差小于400 nm,頻率基準(zhǔn)傳遞1 s阿倫均方差1.3×10-16,保證全系統(tǒng)使用同一時(shí)鐘。
[Abstract]:How to achieve rapid and high precision absolute distance measurement at distances of several meters, tens of meters or even several kilometers has always been a hot topic in metrology science and industrial production. Especially when the existing laser interferometer based on incremental measurement can no longer meet the needs of scientific research and equipment manufacturing, It is of great significance for the basic scientific research and high-end equipment manufacturing in China to study the large size absolute distance measurement methods and devices with a resolution of less than 1 渭 m and a measuring time less than 1 s. Traditional absolute distance measurement methods can be divided into synthetic wavelength method and time flight method. The synthetic wavelength method is not suitable for the fast measurement of large distance with unknown target position because the initial value of the distance to be measured and multiple wavelengths are needed to establish the synthetic wavelength chain. Time flight method is suitable for large scale measurement, but limited by the picosecond resolution of electronic detector, the distance resolution can only reach millimeter, which can not meet the requirement of micron measurement. Therefore, in this paper, the pulse time-domain resolution method based on asynchronous optical sampling and nonlinear frequency-doubling effect is studied. The time-domain resolution of time-flight method is improved to be better than 1 fs and the corresponding range resolution is better than 300 nm, which meets the requirement of large size absolute distance measurement. An absolute distance measuring system with optical frequency comb as light source is established. Asynchronous optical sampling is carried out by using the difference of repetition rate of frequency comb to realize the optical scanning of pulse in time domain. At the same time, the second kind of phase matching intensity is used to quantify the overlap degree of pulse. The time-domain position of the measured pulse is inversed by the intensity of the frequency-doubling signal, and the time-domain resolution of the pulse is better than 1 fs. In addition, in order to overcome the limitation on the range caused by the periodic pulse characteristics of the frequency comb, a parallel dual frequency measurement is proposed to avoid the integer period reading errors caused by the change of the target position in the readjustment process, and to realize the reliable expansion of the measurement range. Considering the demand for the pulse power due to the nonlinear effect, it is proposed to use the electric reference instead of the optical reference to avoid the energy loss of the reference arm and to increase the effective measurement range. Aiming at the problem of measuring refractive index over long distance in atmosphere, the double wavelength parallel measurement of target is carried out by using the frequency doubling effect of fundamental frequency pulse, and the air refractive index is measured under the approximate condition of drying. The frequency doubling cross-correlation is used to detect the position of the fundamental frequency pulse in time domain and the sum frequency cross correlation is used to detect the time domain position of the frequency doubling pulse. The correction of refractive index 10-6 is realized at 12.3 m distance. An active laser ranging experiment method with frequency comb as the light source is proposed to measure the absolute distance between the two stations by using the frequency comb interactively measured in the two stations. At the same time, considering the influence of two stations using different time datum on time-flight measurement, the frequency reference transmission between the two places can be realized by measuring the frequency doubling pulse time interval while measuring the distance. When the distance between the two stations is 23 m, the distance measurement residuals are less than 400 nm, and the frequency reference transmits 1 s Aron mean deviation 1.3 脳 10 ~ (-16), which ensures the use of the same clock in the whole system.
【學(xué)位授予單位】：清華大學(xué)
【學(xué)位級別】：博士
【學(xué)位授予年份】：2016
【分類號(hào)】：TN249

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本文編號(hào)：2145753