TFT-LCD光刻工藝有機(jī)物危害分析及控制措施研究
[Abstract]:According to a survey of 2062 people by the China Youth Daily Social Survey Center, "what you want to buy the most in 2015" shows that 41.4 percent of the respondents want to buy electronic products. Buying electronic products has become a rigid demand in modern society, according to a survey of 2062 people by the China Youth Daily Social Survey Center. Electronic products and related services are becoming a new consumer growth point. At present, China is the largest consumer of electronic products in the world, and it is also a major manufacturing country of electronic products in the world. Since the beginning of the 21st century, China has made a series of major technological breakthroughs in electronic manufacturing related industries. Become the world's largest electronics manufacturing base. In the thin-film transistor liquid crystal display (TFT-LCD) manufacturing industry, with the continuous construction of new factories and the steady operation of the existing factories, many new safety and occupational health problems have been exposed in the industry. Among them, the problem of odor of organic compounds used in photolithography is particularly prominent. These organic compounds are volatile easily, the threshold of smell is very low, and the main components do not have a limit of exposure in the corresponding national standards of occupational hygiene. There is even no national standard for testing. Mixed volatilization of multiple organic compounds is difficult to define the combined hazard effect, which makes many employees begin to worry about the health effects of these organic compounds. At the same time, occupational health and safety managers in the industry and even factory leaders have brought a lot of trouble and pressure. In this paper, through the analysis of the serious exposure process of organic matter in a thin film transistor liquid crystal display (TFT-LCD) manufacturing enterprise in China, the composition of these organic compounds is evaluated, and the hazard source and hazard properties are analyzed. Through the detection method to determine the key distribution area of organic matter exposure, to find out the key control equipment, combined with the particularity of ventilation in clean workshop and the characteristics of technological process connection, to comprehensively evaluate the organic matter odour producing source in the process. Make control measures through its diffusion situation to achieve the goal of site improvement.
【學(xué)位授予單位】:首都經(jīng)濟(jì)貿(mào)易大學(xué)
【學(xué)位級(jí)別】:碩士
【學(xué)位授予年份】:2017
【分類(lèi)號(hào)】:TN873.93
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