基于構(gòu)造運(yùn)動(dòng)光場(chǎng)的高精度直線時(shí)柵位移傳感器研究
發(fā)布時(shí)間：2018-07-31 19:51
【摘要】：精密位移測(cè)量是精密制造運(yùn)行過(guò)程中最關(guān)鍵的物理量測(cè)量,也是產(chǎn)品質(zhì)量保證的重要手段。常見精密位移測(cè)量以光學(xué)測(cè)量為主,其中以激光干涉儀和光柵傳感器為最主要的兩種測(cè)量方式。激光干涉儀價(jià)格昂貴且對(duì)環(huán)境要求高,而高精度光柵對(duì)基礎(chǔ)設(shè)施、制造工藝要求高,并且國(guó)外對(duì)我國(guó)實(shí)行嚴(yán)格技術(shù)封鎖,導(dǎo)致我國(guó)光學(xué)精密測(cè)量技術(shù)及設(shè)備遠(yuǎn)遠(yuǎn)落后于先進(jìn)技術(shù)水平。基于此,本文在國(guó)家自然科學(xué)基金的資助下開展了構(gòu)造運(yùn)動(dòng)光場(chǎng)的直線時(shí)柵位移傳感器研究。利用國(guó)內(nèi)相對(duì)落后的光柵制作工藝和基礎(chǔ)設(shè)施,研制一種可以媲美國(guó)外高精度光柵的位移傳感器。主要研究?jī)?nèi)容和創(chuàng)新點(diǎn)如下:(1)將形式各異的位移測(cè)量方法,歸納成兩種主要的數(shù)學(xué)模型,并對(duì)其位移測(cè)量特征進(jìn)行分析;同時(shí)歸納總結(jié)了時(shí)柵位移測(cè)量的數(shù)學(xué)模型,并解釋了時(shí)柵以“時(shí)間戳”實(shí)現(xiàn)位移測(cè)量的本質(zhì)特征。(2)從旋轉(zhuǎn)磁場(chǎng)產(chǎn)生原理出發(fā),提出在光學(xué)領(lǐng)域?qū)鈴?qiáng)用精確的空間和時(shí)間調(diào)制,實(shí)現(xiàn)高精度運(yùn)動(dòng)光場(chǎng)的構(gòu)建的方法。并設(shè)計(jì)一種光敏陣列直接調(diào)制的單柵式時(shí)柵傳感器樣機(jī),用實(shí)驗(yàn)驗(yàn)證了這種利用光強(qiáng)空間和時(shí)間調(diào)制實(shí)現(xiàn)位移測(cè)量方案的可行性。(3)開展LED準(zhǔn)直光源設(shè)計(jì)、仿真和制作研究工作。根據(jù)LED點(diǎn)光源特征,結(jié)合仿真軟件對(duì)光源模型進(jìn)行仿真,并提出采用自由曲面準(zhǔn)直透鏡設(shè)計(jì)方法,對(duì)LED進(jìn)行二次配光設(shè)計(jì)。通過(guò)搭建3D仿真模型仿真、透鏡實(shí)際制作和光源效果測(cè)試,完成了四組出光角度±10°的準(zhǔn)直光源設(shè)計(jì)與制作。(4)研究了高精度運(yùn)動(dòng)光場(chǎng)產(chǎn)生及控制方法。主要包括傳感器透光面空間結(jié)構(gòu)設(shè)計(jì)、光源設(shè)計(jì)、高精度交變光場(chǎng)產(chǎn)生及高精度光電轉(zhuǎn)換電路設(shè)計(jì)等,為如何獲取高精度運(yùn)動(dòng)光場(chǎng)提供了依據(jù)。對(duì)最終合成運(yùn)動(dòng)光場(chǎng)的性能,在兩種不同結(jié)構(gòu)的傳感器樣機(jī)上分別進(jìn)行了測(cè)試,驗(yàn)證了以上控制方法的可行性。(5)開展了兩種結(jié)構(gòu)時(shí)柵傳感器的實(shí)驗(yàn)研究工作,分別檢驗(yàn)構(gòu)造運(yùn)動(dòng)光場(chǎng)實(shí)現(xiàn)位移測(cè)量的實(shí)際效果和傳感器樣機(jī)的工作性能。對(duì)影響構(gòu)造運(yùn)動(dòng)光場(chǎng)直線時(shí)柵傳感器系統(tǒng)的主要誤差源進(jìn)行了分析和計(jì)算,并提出硬件和直線插補(bǔ)的軟件相結(jié)合的誤差修正方法。實(shí)驗(yàn)結(jié)果表明,在150mm量程范圍內(nèi),四相透光式時(shí)柵測(cè)量準(zhǔn)確度為±0.45μm,三相差動(dòng)透光式時(shí)柵測(cè)量準(zhǔn)確度為±0.4μm。(6)研究提高系統(tǒng)穩(wěn)定性的方法。對(duì)不同對(duì)極數(shù)、差動(dòng)結(jié)構(gòu)的傳感器系統(tǒng)穩(wěn)定性進(jìn)行對(duì)比測(cè)量,并提出遞推平均濾波的數(shù)字濾波方法,以提高系統(tǒng)穩(wěn)定性。實(shí)驗(yàn)證明,采用差動(dòng)結(jié)構(gòu)、多對(duì)極平均效應(yīng)、遞推平均算法等方法后,可以獲取一個(gè)高穩(wěn)定性的測(cè)量系統(tǒng)。綜上所述,本文結(jié)合時(shí)柵測(cè)量原理,在光學(xué)領(lǐng)域提出用光強(qiáng)時(shí)空正交調(diào)制合成運(yùn)動(dòng)光場(chǎng)實(shí)現(xiàn)精密位移測(cè)量的方法,基于此方法,設(shè)計(jì)并研制了兩種不同結(jié)構(gòu)的光場(chǎng)式時(shí)柵傳感器。實(shí)驗(yàn)研究表明,所研制的光場(chǎng)式時(shí)柵傳感器具有制造成本低,而測(cè)量精度高、穩(wěn)定性好的優(yōu)點(diǎn)。因此,本文的研究,不僅為時(shí)柵傳感器構(gòu)建了一個(gè)“光-電-磁”的完整研究體系,而且為光學(xué)位移測(cè)量提供了一種不依賴精密制造工藝,實(shí)現(xiàn)精密位移測(cè)量的新型測(cè)量方法。
[Abstract]:Precision displacement measurement is the most important measure of physical quantity in the operation of precision manufacturing, and it is also an important means of product quality assurance. The common precision displacement measurement is mainly optical measurement, in which laser interferometer and grating sensor are the two most important measurement methods. The laser interferometer is expensive and high in environment and high precision. The grating has high requirements for infrastructure, manufacturing technology and strict technical blockade in our country. The optical precision measurement technology and equipment in our country are far behind the advanced technology level. Based on this, this paper has carried out a linear time grating displacement sensor of the structural movement light field under the support of the National Natural Science Foundation. A relatively backward grating fabrication technology and infrastructure are developed to develop a displacement sensor which can match the high precision grating of foreign countries. The main research content and innovation points are as follows: (1) the displacement measurement methods of different forms are summed up into two main mathematical models, and their displacement measurement characteristics are analyzed; and the time grid is summarized and summarized. The mathematical model of displacement measurement is made and the essential characteristics of displacement measurement are realized by time stamp. (2) from the principle of rotating magnetic field, a method of precise space and time modulation in the field of optical intensity is proposed to realize the construction of high precision moving light field. The gate sensor prototype has verified the feasibility of using the light intensity space and time modulation to realize the displacement measurement scheme. (3) carry out the design, simulation and research work of the LED collimation light source. According to the characteristics of the LED point light source, the simulation software is used to simulate the light source model, and the design method of the free surface collimation lens is proposed, and the L is designed. ED carries out two light matching design. Through the simulation of 3D simulation model, the actual fabrication of lens and the test of light source effect, the design and production of four groups of collimating light sources with light angle of 10 degrees are completed. (4) the production and control methods of high precision moving light field are studied. The design of the spatial structure of the transmittance surface of the sensor, the design of the light source and the high precision alternating light are mainly included. The field generation and the high precision photoelectric conversion circuit design provide the basis for how to obtain the high precision moving light field. The performance of the final synthetic motion light field is tested on the two different structure sensor prototype, and the feasibility of the above control method is verified. (5) the experimental research work of two kinds of structure time grating sensors is carried out. The actual effect of the displacement measurement and the working performance of the sensor prototype are tested respectively. The main error sources of the grating sensor system which affect the straight line of the structural motion light field are analyzed and calculated, and the error correction method combined with the software of the hardware and the linear interpolation is put forward. The experimental results show that the 150mm quantity is at the same time. Within the range, the accuracy of the four phase transmittance grating measurement is + 0.45 m, and the accuracy of the three phase differential transmittance grating measurement is + 0.4 M. (6) to improve the stability of the system. The stability of the sensor systems with different opposite poles and differential structures is compared and measured, and the digital filtering method of recursive mean filtering is proposed to improve the system. The experimental results show that a high stability measurement system can be obtained by using the differential structure, the multiple pairs of polar mean effects and the recursive mean algorithm. In the light of the principle of the time grating measurement, this paper proposes a method for the precision displacement measurement by using the optical intensity space-time orthogonal modulation to synthesize the moving light field, based on this method. Two kinds of light field type time grating sensors are designed and developed. The experimental study shows that the developed light field grating sensor has the advantages of low manufacturing cost, high measurement precision and good stability. Therefore, this paper not only constructs a complete study system of "light electric magnetic" for the time grid sensor, but also is the light of light field sensor. Degree shift measurement provides a new measurement method without precise manufacturing technology to achieve precise displacement measurement.
【學(xué)位授予單位】：重慶大學(xué)
【學(xué)位級(jí)別】：博士
【學(xué)位授予年份】：2016
【分類號(hào)】：TP212
本文編號(hào)：2156659
[Abstract]:Precision displacement measurement is the most important measure of physical quantity in the operation of precision manufacturing, and it is also an important means of product quality assurance. The common precision displacement measurement is mainly optical measurement, in which laser interferometer and grating sensor are the two most important measurement methods. The laser interferometer is expensive and high in environment and high precision. The grating has high requirements for infrastructure, manufacturing technology and strict technical blockade in our country. The optical precision measurement technology and equipment in our country are far behind the advanced technology level. Based on this, this paper has carried out a linear time grating displacement sensor of the structural movement light field under the support of the National Natural Science Foundation. A relatively backward grating fabrication technology and infrastructure are developed to develop a displacement sensor which can match the high precision grating of foreign countries. The main research content and innovation points are as follows: (1) the displacement measurement methods of different forms are summed up into two main mathematical models, and their displacement measurement characteristics are analyzed; and the time grid is summarized and summarized. The mathematical model of displacement measurement is made and the essential characteristics of displacement measurement are realized by time stamp. (2) from the principle of rotating magnetic field, a method of precise space and time modulation in the field of optical intensity is proposed to realize the construction of high precision moving light field. The gate sensor prototype has verified the feasibility of using the light intensity space and time modulation to realize the displacement measurement scheme. (3) carry out the design, simulation and research work of the LED collimation light source. According to the characteristics of the LED point light source, the simulation software is used to simulate the light source model, and the design method of the free surface collimation lens is proposed, and the L is designed. ED carries out two light matching design. Through the simulation of 3D simulation model, the actual fabrication of lens and the test of light source effect, the design and production of four groups of collimating light sources with light angle of 10 degrees are completed. (4) the production and control methods of high precision moving light field are studied. The design of the spatial structure of the transmittance surface of the sensor, the design of the light source and the high precision alternating light are mainly included. The field generation and the high precision photoelectric conversion circuit design provide the basis for how to obtain the high precision moving light field. The performance of the final synthetic motion light field is tested on the two different structure sensor prototype, and the feasibility of the above control method is verified. (5) the experimental research work of two kinds of structure time grating sensors is carried out. The actual effect of the displacement measurement and the working performance of the sensor prototype are tested respectively. The main error sources of the grating sensor system which affect the straight line of the structural motion light field are analyzed and calculated, and the error correction method combined with the software of the hardware and the linear interpolation is put forward. The experimental results show that the 150mm quantity is at the same time. Within the range, the accuracy of the four phase transmittance grating measurement is + 0.45 m, and the accuracy of the three phase differential transmittance grating measurement is + 0.4 M. (6) to improve the stability of the system. The stability of the sensor systems with different opposite poles and differential structures is compared and measured, and the digital filtering method of recursive mean filtering is proposed to improve the system. The experimental results show that a high stability measurement system can be obtained by using the differential structure, the multiple pairs of polar mean effects and the recursive mean algorithm. In the light of the principle of the time grating measurement, this paper proposes a method for the precision displacement measurement by using the optical intensity space-time orthogonal modulation to synthesize the moving light field, based on this method. Two kinds of light field type time grating sensors are designed and developed. The experimental study shows that the developed light field grating sensor has the advantages of low manufacturing cost, high measurement precision and good stability. Therefore, this paper not only constructs a complete study system of "light electric magnetic" for the time grid sensor, but also is the light of light field sensor. Degree shift measurement provides a new measurement method without precise manufacturing technology to achieve precise displacement measurement.
【學(xué)位授予單位】：重慶大學(xué)
【學(xué)位級(jí)別】：博士
【學(xué)位授予年份】：2016
【分類號(hào)】：TP212
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