多功能鍵合儀研制及在教學中的應用
發(fā)布時間:2019-05-14 16:33
【摘要】:對硅/玻璃陽極鍵合進行了實驗技術研究,闡述了實驗設計思路;確定了實驗的內容和方法,據(jù)此研制出能直觀顯示硅/玻璃界面鍵合情況以及鍵合電流-時間曲線的多功能鍵合實驗儀。通過鍵合操作、現(xiàn)象觀察和深入分析,使學生更加深入了解鍵合機理、掌握影響鍵合效果與效率的主要因素。該實驗技術有助于提升學生的動手能力、分析能力以及綜合素質。
[Abstract]:The experimental technology of silicon / glass anode bonding is studied, and the experimental design idea is expounded. The contents and methods of the experiment are determined, and a multifunctional bonding experimental instrument is developed, which can intuitively display the bonding of silicon / glass interface and the bonding current-time curve. Through bonding operation, phenomenon observation and in-depth analysis, the students can understand the bonding mechanism more deeply and master the main factors that affect the bonding effect and efficiency. This experimental technique is helpful to improve students' practical ability, analytical ability and comprehensive quality.
【作者單位】: 哈爾濱工業(yè)大學航天學院;
【基金】:黑龍江省自然科學基金項目(E200917) 哈爾濱工業(yè)大學教學實驗室建設項目
【分類號】:TN405
本文編號:2476866
[Abstract]:The experimental technology of silicon / glass anode bonding is studied, and the experimental design idea is expounded. The contents and methods of the experiment are determined, and a multifunctional bonding experimental instrument is developed, which can intuitively display the bonding of silicon / glass interface and the bonding current-time curve. Through bonding operation, phenomenon observation and in-depth analysis, the students can understand the bonding mechanism more deeply and master the main factors that affect the bonding effect and efficiency. This experimental technique is helpful to improve students' practical ability, analytical ability and comprehensive quality.
【作者單位】: 哈爾濱工業(yè)大學航天學院;
【基金】:黑龍江省自然科學基金項目(E200917) 哈爾濱工業(yè)大學教學實驗室建設項目
【分類號】:TN405
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1 毛奇凰;張廣星;李少偉;;CPLD在教學實驗中的應用[J];中國水運(學術版);2007年04期
,本文編號:2476866
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